The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2018
Filed:
Mar. 04, 2016
Applicant:
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Inventors:
Shuhei Yabu, Tokyo, JP;
Naoto Koga, Tokyo, JP;
Mitsuo Akatsu, Tokyo, JP;
Isao Takahira, Tokyo, JP;
Shinichi Tomita, Tokyo, JP;
Hiroyuki Noda, Tokyo, JP;
Ai Masuda, Tokyo, JP;
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G21K 5/00 (2006.01); H01J 37/16 (2006.01); H01J 37/248 (2006.01);
U.S. Cl.
CPC ...
H01J 37/16 (2013.01); H01J 37/248 (2013.01); H01J 37/26 (2013.01);
Abstract
Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device () is provided with a detachable body unit () and an auxiliary unit (), the body unit () housing a functional unit related to charged particle beams, and the auxiliary unit () housing a power source unit ().