The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 26, 2018

Filed:

Dec. 14, 2015
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Cho-Fan Hsieh, Luodong Township, Yilan County, TW;

Chih-Hua Chen, Taipei, TW;

Ming-Han Liao, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/65 (2006.01); G01J 3/44 (2006.01);
U.S. Cl.
CPC ...
G01N 21/65 (2013.01); G01J 3/44 (2013.01);
Abstract

A carrier concentration measuring method and an apparatus thereof including a focuser, a spectrometer and a processor are disclosed. The measuring method includes the following steps. Project a laser beam to an object. Analyze a Raman signal, obtained from a radiation propagating from the object projected by the laser beam, to obtain a measurement result of the object. Analyze the measurement result to obtain an intensity ratio or a Raman shift. Look up a carrier concentration of the object in a database according to the intensity ratio or the Raman shift.


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