Zengdi Lian

Title: Innovations by Zengdi Lian in Plasma Processing Technology

Introduction

Zengdi Lian is a notable inventor based in Shanghai, China, recognized for his contributions to plasma processing technology. He holds two patents that showcase his innovative approach to enhancing the efficiency and reliability of plasma processing apparatuses.

Latest Patents

Lian's latest patents include a bottom electrode assembly and a plasma processing apparatus, along with a method for replacing a focus ring. The bottom electrode assembly features a base that supports a wafer, surrounded by a focus ring and a cover ring with recesses for moving blocks. This design allows for the replacement of the focus ring without the need to open the process chamber, streamlining operations. His second patent introduces a corrosion-resistant structure for a gas delivery system in plasma processing apparatuses. This innovation involves a plating layer of corrosion-resistant material to minimize contamination and enhance the durability of the system. The use of a flexible corrosion-resistant material, such as Teflon, improves the sealing effect and prolongs the service life of the apparatus.

Career Highlights

Zengdi Lian is currently employed at Advanced Micro-fabrication Equipment Inc. China, where he applies his expertise in developing advanced technologies for plasma processing. His work significantly contributes to the field, ensuring that equipment operates efficiently and reliably.

Collaborations

Lian collaborates with talented coworkers, including Rason Zuo and Dee Wu, who share his commitment to innovation in the field of micro-fabrication.

Conclusion

Zengdi Lian's innovative patents and contributions to plasma processing technology highlight his role as a leading inventor in the industry. His work not only enhances operational efficiency but also addresses critical challenges in the field.