Location History:
- Fort Collins, CO (US) (1988)
- Ft. Collins, CO (US) (1988 - 1990)
Company Filing History:
3 out of 7 
1 out of 833,002 Years Active: 1988-1990
Title: The Innovative Contributions of Zeng-qi Yu
Introduction
Zeng-qi Yu is a notable inventor based in Ft. Collins, CO (US). He has made significant contributions to the field of plasma technology, holding a total of 4 patents. His work focuses on advancements in ultraviolet (UV) lamp technology and cold cathode electron beams.
Latest Patents
One of Zeng-qi Yu's latest patents is for a wide area VUV lamp with grids and purging jets. This invention utilizes a disc-shaped plasma generated by a ring-shaped cold cathode, serving as both an in-situ large area VUV lamp and a source of ground state and excited atoms. The atoms produced in the plasma can initiate sensitized atom-molecule reactions, aiding in the dissociation of molecules and providing external energy for heterogeneous surface reactions. The design incorporates multiple grid electrodes to extract ions or electrons during the deposition process. Additionally, the disc-shaped plasma is optically thin for resonance photons, minimizing undesired resonance trapping. This innovative VUV lamp operates without optical windows, allowing atoms to diffuse directly from the plasma to the substrate.
Another significant patent involves the mounting of a cold cathode directly to a vacuum chamber wall. This design allows for the generation of an abnormal glow discharge electron beam within the vacuum chamber while ensuring that only the emitting front face of the cold cathode is located inside the chamber. The remainder of the cold cathode is positioned outside, electrically insulated from the chamber wall.
Career Highlights
Zeng-qi Yu has worked with various companies throughout his career, including Applied Electron Corporation. His expertise in plasma technology has positioned him as a key figure in the development of innovative solutions in this field.
Collaborations
Zeng-qi Yu has collaborated with notable individuals such as George J Collins and John R McNeil. These partnerships have contributed to the advancement of his research and inventions.
Conclusion
Zeng-qi Yu's contributions to plasma technology and his innovative patents highlight his role as a significant inventor in the field. His work continues to influence advancements in UV lamp technology and electron beam applications.