Location History:
- Seongnam, KR (2003)
- Kyunggi-do, KR (2003 - 2004)
- Sungnam, KR (2006)
Company Filing History:
Years Active: 2003-2006
Title: The Innovative Contributions of Young Suk Lee in Thin Film Technology
Introduction
Young Suk Lee is a prominent inventor based in Kyunggi-do, South Korea, known for his significant contributions to the field of thin film technology. With a portfolio of four patents, Lee has dedicated his career to developing advanced methods for fabricating materials that are essential in various technological applications.
Latest Patents
Lee's latest patents illustrate his innovative approach to material fabrication. One of his primary patents is a method for fabricating hydrogenated silicon oxycarbide thin films. This method involves supplying bis-trimethylsilylmethane and an oxygen-retaining gas to a wafer within a reaction channel while applying hydrogen to minimize carbon loss during post-processing. The process is enhanced by generating plasma through applied RF power in the range of 100 W to 2000 W.
Another noteworthy patent from Lee is for a plasma-enhanced chemical vapor deposition (PECVD) apparatus. This sophisticated apparatus features multiple susceptors that are horizontally mounted with wafers, allowing for effective and uniform thin film deposition. By rotating spray injectors that supply gas into the reaction chamber at controlled pressures and temperatures, Lee's invention provides a refined method for producing high-quality thin films.
Career Highlights
Young Suk Lee's career has taken him through several esteemed companies, including Jusung Engineering Co., Ltd. and Applied Materials, Inc. His work has not only focused on the technical aspects of materials development but also on the commercialization of innovative technologies that push the boundaries of the semiconductor industry.
Collaborations
Throughout his professional journey, Lee has collaborated with notable individuals such as Kent Rossman and Zhuang Li. These partnerships have played a significant role in enhancing the research and development of innovative thin film technologies. Working alongside talented peers has driven advancements in Lee's work, contributing to his reliability as an inventor in his field.
Conclusion
In summary, Young Suk Lee is a distinguished inventor whose innovations have revolutionized thin film technology. With his latest patents in the fabrication of hydrogenated silicon oxycarbide thin films and the development of an advanced PECVD apparatus, Lee continues to make substantial contributions to the industry. His collaborations and experience in reputable companies further emphasize his skills and commitment to innovation.