Yoshinori Matsui

Title: Innovations of Yoshinori Matsui

Introduction

Yoshinori Matsui is a notable inventor based in Joetsu, Japan. He has made significant contributions to the field of chemical engineering, particularly in the development of advanced resist compositions used in semiconductor manufacturing. With a total of two patents to his name, Matsui's work has had a considerable impact on the industry.

Latest Patents

Matsui's latest patents include a positive resist composition and a patterning process. The positive resist composition comprises two onium salts, a base polymer with acid labile group-containing recurring units, and an organic solvent. This composition is designed to form a pattern with enhanced properties, including depth of focus (DOF), line width roughness (LWR), and controlled footing profile. Additionally, he has developed an epoxy compound that is part of a resist composition capable of effectively controlling the diffusion length of acid generated from an acid generator without sacrificing sensitivity.

Career Highlights

Matsui is currently employed at Shin-Etsu Chemical Co., Ltd., a leading company in the chemical industry. His work at the company has allowed him to focus on innovative solutions that address the challenges faced in semiconductor manufacturing.

Collaborations

Matsui has collaborated with several talented individuals in his field, including Masayoshi Sagehashi and Tatsushi Kaneko. These collaborations have fostered an environment of innovation and creativity, leading to advancements in resist technology.

Conclusion

Yoshinori Matsui's contributions to the field of chemical engineering and semiconductor manufacturing are noteworthy. His innovative patents and collaborations highlight his commitment to advancing technology in this critical industry.