Company Filing History:
Years Active: 1992-1993
Title: Innovations of Yoshimitsu Saze
Introduction
Yoshimitsu Saze is a notable inventor based in Katsuta, Japan. He has made significant contributions to the field of technology, particularly in the area of optical measurement and alignment systems. With a total of 2 patents, Saze has demonstrated his expertise and innovative spirit in his work.
Latest Patents
Saze's latest patents include a reduction exposure apparatus with correction for alignment light. This invention involves a diffraction grating shaped reference pattern that has the same grating pitch as the alignment pattern formed on a wafer. The apparatus irradiates the reference pattern with alignment light, storing the diffracted light signal in memory. The alignment pattern on the wafer is then corrected based on this stored signal. Another significant patent is a method and apparatus for measuring minute displacement using light. This invention applies light of a first wavelength at a predetermined angle to a diffraction grating on an object. It measures the phase difference between the measurement signal and a reference signal to determine minute displacements accurately.
Career Highlights
Yoshimitsu Saze is currently employed at Hitachi, Ltd., where he continues to innovate and contribute to advancements in technology. His work has been instrumental in developing systems that enhance precision in optical measurements.
Collaborations
Saze has collaborated with notable colleagues such as Shuji Sugiyama and Katsunori Onuki. Their combined expertise has fostered an environment of innovation and creativity in their projects.
Conclusion
Yoshimitsu Saze's contributions to technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in optical measurement systems.