Company Filing History:
Years Active: 1998-2002
Title: Innovations of Yoshihisa Ooaeh
Introduction
Yoshihisa Ooaeh is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of charged-particle beam technology, holding a total of 13 patents. His work has been instrumental in advancing methods and devices used in semiconductor manufacturing.
Latest Patents
One of Yoshihisa Ooaeh's latest patents is a charged-particle-beam exposure device and method. This innovative method involves exposing a wafer to a charged-particle beam that is directed by a deflector. The process includes arranging multiple first marks at varying heights and focusing the charged-particle beam on each mark using a focus coil positioned above the deflector. The method also entails obtaining focus distances for each mark and calculating deflection-efficiency-correction coefficients. This approach allows for precise adjustments based on focus distance, enhancing the accuracy of the exposure process.
Career Highlights
Yoshihisa Ooaeh has built a successful career at Fujitsu Corporation, where he has been able to apply his expertise in charged-particle beam technology. His innovative contributions have not only advanced the company's technological capabilities but have also had a lasting impact on the industry as a whole.
Collaborations
Throughout his career, Yoshihisa Ooaeh has collaborated with notable colleagues, including Hiroshi Yasuda and Tomohiko Abe. These partnerships have fostered a creative environment that has led to groundbreaking advancements in their field.
Conclusion
Yoshihisa Ooaeh's work exemplifies the spirit of innovation in the realm of charged-particle beam technology. His patents and contributions continue to influence the semiconductor industry, showcasing the importance of inventive minds in driving technological progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.