Company Filing History:
Years Active: 2021-2025
Title: Innovations by Yoshifumi Ogawa
Introduction
Yoshifumi Ogawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of gas supply control technology. With a total of 4 patents to his name, Ogawa continues to push the boundaries of innovation in his industry.
Latest Patents
One of his latest inventions is a gas supply control device designed to supply gas to a processing chamber where a workpiece is processed. This device includes a first port connected to a gas source of a purge gas and a second port connected to a gas source of a processing gas. The device features a collective pipe where both gases merge and flow. It also incorporates a first flow rate controller between the first port and the collective pipe, as well as a second flow rate controller between the second port and the collective pipe. Additionally, a gas flow path is provided for the purge gas to flow from the output side of the first flow rate controller to the input side of the second flow rate controller.
Another notable patent is a gas supply apparatus that effectively suppresses backflow of a process gas during processing inside a chamber. This apparatus supplies gas to a processing chamber where a sample is processed. It includes ports connected to gas sources of various types of gases, including purging and processing gases. The collective pipe allows for the joining and flow of these gases, with a gas flow path formed for the purging gas on the uppermost stream side of the collective pipe.
Career Highlights
Yoshifumi Ogawa is currently employed at Hitachi High-Tech Corporation, where he continues to develop innovative technologies. His work has significantly impacted the efficiency and effectiveness of gas supply systems in various applications.
Collaborations
Ogawa collaborates with talented coworkers, including Yutaka Kouzuma and Kazuyuki Hirozane. Their combined expertise fosters a creative environment that enhances the development of cutting-edge technologies.
Conclusion
Yoshifumi Ogawa's contributions to gas supply control technology exemplify his innovative spirit and dedication to advancing the field. His patents reflect a commitment to solving complex challenges in gas processing, making him a notable figure in the industry.