Company Filing History:
Years Active: 1986-1991
Title: The Innovative Mind of Yoshie Tanaka
Introduction
Yoshie Tanaka, an accomplished inventor based in Kudamatsu, Japan, has significantly contributed to the field of semiconductor technology. With a total of two registered patents, her innovative solutions have enhanced processes in sample treatment and etching monitoring.
Latest Patents
Tanaka's latest inventions include a "Sample Treating Method and Apparatus" and a "Method and Apparatus for Monitoring Etching." The first patent introduces a method adapted for treating semiconductor substrates that require both etching and anticorrosion treatments. This advanced technology utilizes plasma from an anticorrosion gas to remove adhered materials effortlessly, improving the throughput of treated samples without necessitating a wet-type anticorrosion treatment.
Her second patent focuses on monitoring the etching process. It details a method that regulates the gas pressure inside a treating chamber during a dry etching process, allowing for precise observation of the etching state through the analysis of the emission line spectrum over time. This innovative apparatus effectively combines exhaust means, plasma generation, and spectrum detection to ensure optimal control during fabrication.
Career Highlights
Yoshie Tanaka is affiliated with Hitachi, Ltd., where she continues to push the boundaries of technology through her inventive spirit. Her profound understanding of semiconductor processing techniques has established her as a key player in her field.
Collaborations
Throughout her career, Tanaka has collaborated with talented professionals, including Kotaro Fujimoto and Hironobu Kawahara. Their joint efforts contribute to advancing semiconductor technology and improving industry standards.
Conclusion
Yoshie Tanaka’s contributions through her patents reflect her dedication to innovation in semiconductor technology. Her work exemplifies how targeted inventions can pave the way for advancements in manufacturing and processing techniques, showcasing the impact that a single inventor can have on the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.