Location History:
- Machida, JA (1976 - 1978)
- Machida, JP (1979 - 1980)
Company Filing History:
Years Active: 1976-1980
Title: Yoichi Hirabayashi: Innovator in Scanning Technology
Introduction
Yoichi Hirabayashi is a prominent inventor based in Machida, Japan. He has made significant contributions to the field of optical scanning technology, holding a total of 5 patents. His work primarily focuses on devices that enhance the precision and efficiency of scanning objects with light beams.
Latest Patents
Hirabayashi's latest patents include a device for scanning an object with a light beam. This innovative scanning device is designed to scan objects that have both flat and inclined reflection surfaces, such as masks and wafers used in the manufacturing of integrated circuits (IC) and large-scale integration (LSI) devices. The device utilizes a telecentric lens as the scanning lens, ensuring that the original point of deflection of the light beam coincides with the center of the pupil of the lens. Additionally, a filter is placed on the pupil surface to intercept light from the flat reflection surface, allowing for the detection of only the reflected light from the inclined surface. The optical system between the scanning device and the object is characterized by f-.theta. lens properties, which compensates for the non-linearity of the scanning beam caused by the uniform angular velocity movement of the device.
Career Highlights
Hirabayashi is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to develop cutting-edge technologies that are integral to modern manufacturing processes.
Collaborations
Throughout his career, Hirabayashi has collaborated with notable colleagues, including Akiyoshi Suzuki and Setsuo Minami. These collaborations have further enriched his contributions to the field of optical scanning technology.
Conclusion
Yoichi Hirabayashi's innovative work in scanning technology has made a significant impact on the manufacturing of integrated circuits and large-scale integration devices. His patents reflect a commitment to advancing optical scanning methods, showcasing his expertise and dedication to innovation.