Title: Wilfried Lerch - Innovator in Thermal Treatment Technologies
Introduction
Wilfried Lerch is an inventor based in Munich, Germany, known for his contributions to thermal treatment technologies. He currently works at Hq-dielectrics GmbH, where he collaborates with colleagues such as Zsolt Nenyei and Thomas Theiler. Although he has not yet been granted any patents, his innovative ideas are reflected in his patent applications.
Latest Patent Applications
One of Wilfried Lerch's notable patent applications is titled "Method and Device for the Thermal Treatment of Substrates and Holding Unit for Substrates." This invention relates to a method and device designed for the thermal treatment of substrates, particularly semiconductor wafers. The process involves a specialized holding unit that supports substrates within a process chamber equipped with multiple radiation sources. The method includes several steps, such as loading the box and substrate into the process chamber, purging the holding space with a gas, and heating the box and substrate to a desired temperature using thermal radiation.
Conclusion
Wilfried Lerch's work in thermal treatment technologies showcases his innovative spirit and dedication to advancing the field. His patent application reflects a significant contribution to the industry, and his ongoing efforts at Hq-dielectrics GmbH may lead to future advancements in substrate processing.