Weilin Tu

Title: Weilin Tu: Innovator in Wafer Technology

Introduction

Weilin Tu is a notable inventor based in Natick, MA (US). He has made significant contributions to the field of wafer technology, holding 2 patents that showcase his innovative approach to wafer handling and monitoring.

Latest Patents

Weilin Tu's latest patents include a "Wafer release method and apparatus" and a "Wafer sensing and clamping monitor." The wafer release method involves a circuit that monitors capacitance between two electrodes within a wafer support. The capacitance varies depending on the presence and clamping status of the wafer. This technology allows for precise confirmation of wafer placement and clamping through the conversion of sensed capacitance into a frequency and then a D.C. voltage level. The clamping voltage can be reversed at a controlled frequency to release the wafer, effectively disrupting the electrostatic attraction between the wafer and its support.

Career Highlights

Throughout his career, Weilin Tu has worked with reputable companies, including Eaton Corporation. His experience in these organizations has contributed to his expertise in wafer technology and innovation.

Collaborations

Weilin Tu has collaborated with notable coworkers such as Julian G. Blake and Dale K. Stone. Their combined efforts have likely enhanced the development and implementation of innovative technologies in their field.

Conclusion

Weilin Tu's contributions to wafer technology through his patents and collaborations highlight his role as a significant innovator in the industry. His work continues to influence advancements in wafer handling and monitoring systems.