Toshihiro Nakajima

Title: Toshihiro Nakajima: Innovator in Semiconductor Heat Treatment Technologies

Introduction

Toshihiro Nakajima is a prominent inventor based in Kyoto, Japan, recognized for his innovative contributions to semiconductor manufacturing technologies. With five patents to his name, Nakajima has made significant strides in developing heat treatment apparatuses that enhance the uniformity and efficiency of semiconductor processing.

Latest Patents

Toshihiro Nakajima's most recent patents focus on advanced heat treatment apparatuses designed to improve the quality of semiconductor wafers. His first patent details a light-emitting heat treatment apparatus that includes annular reflecting rings positioned on the upper and lower sides of a chamber. This design features a recessed portion that encircles the holding part for the semiconductor wafer, preventing non-uniform light reflection from halogen and flash lamps. The result is a remarkable enhancement in the in-plane temperature distribution during heat treatment.

Another of his notable inventions is a heat treatment apparatus that emits a flash of light. This system incorporates a reflector that covers multiple flash lamps arranged in an array. A cooling box is situated above the reflector, featuring a buffer space and jet openings that allow nitrogen gas to directly cool the flash lamps. This innovative cooling system effectively reduces lamp temperatures, optimizing the apparatus's performance.

Career Highlights

Toshihiro Nakajima works with Dainippon Screen Manufacturing Co., Ltd., a company at the forefront of developing advanced semiconductor and flat panel display technologies. His work has not only contributed to the company's success but has also had a significant impact on the broader semiconductor industry.

Collaborations

Throughout his career, Nakajima has collaborated with talented engineers and innovators, including Takatoshi Chiba and Kiyofumi Nishii. These partnerships have fostered an environment of creativity and innovation, allowing for the development of cutting-edge technologies.

Conclusion

Toshihiro Nakajima's contributions to the field of semiconductor heat treatment are invaluable. His innovative patents reflect a deep understanding of the technical challenges faced in semiconductor manufacturing, and his work continues to pave the way for advancements in the industry. As technology evolves, Nakajima's inventions will undoubtedly play a critical role in shaping the future of semiconductor processing.