Company Filing History:
Years Active: 2016-2017
Title: Innovations by Ting-Ying Chung in Semiconductor Fabrication
Introduction
Ting-Ying Chung is a notable inventor based in Fremont, CA, who has made significant contributions to the field of semiconductor fabrication. With a total of 2 patents, his work focuses on improving methods and apparatus for etching semiconductor substrates.
Latest Patents
Chung's latest patents include innovative applications of internal plasma grids for semiconductor fabrication. These embodiments pertain to improved methods and apparatus for etching a semiconductor substrate. A plasma grid assembly is strategically positioned in a reaction chamber to divide the chamber into upper and lower sub-chambers. The assembly may consist of one or more plasma grids featuring slots of a specific aspect ratio, allowing certain species to pass from the upper sub-chamber to the lower sub-chamber. In certain instances, an electron-ion plasma is generated in the upper sub-chamber. Electrons that traverse the grid to the lower sub-chamber are cooled during their passage. This process can result in an ion-ion plasma in the lower sub-chamber, which can be utilized advantageously in various etching processes.
Career Highlights
Chung is currently employed at Lam Research Corporation, where he continues to advance his research and development efforts in semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor fabrication processes.
Collaborations
Some of his notable coworkers include Alex Paterson and Do Young Kim, who collaborate with him on various projects within the company.
Conclusion
Ting-Ying Chung's contributions to semiconductor fabrication through his innovative patents highlight his expertise and commitment to advancing technology in this critical field. His work continues to influence the industry positively.