Company Filing History:
Years Active: 2002
Title: Innovations by Inventor Ting Chien
Introduction
Ting Chien is a notable inventor based in Cupertino, CA. He has made significant contributions to the field of semiconductor technology. His innovative methods have advanced the processes involved in photoresist stripping.
Latest Patents
Ting Chien holds a patent for a method titled "Post etch photoresist strip with hydrogen for organosilicate glass low-k etch applications." This method involves stripping photoresist from a semiconductor wafer that includes a layer of organosilicate dielectric. The process introduces a flow of hydrogen-containing gas to the wafer, forming a plasma in proximity to at least a portion of the wafer. This plasma is utilized to strip at least a portion of the photoresist from the wafer. Notably, this stripping occurs in situ within the etch apparatus, following an etching step. A surprising result of this invention is that elevated concentrations of hydrogen gas enable high throughput strip rates while ensuring safety during the process. Ting Chien has 1 patent to his name.
Career Highlights
Ting Chien is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work focuses on enhancing the efficiency and safety of semiconductor processing techniques.
Collaborations
Ting collaborates with talented professionals such as Janet M. Flanner and Ian J. Morey, contributing to innovative projects within the semiconductor industry.
Conclusion
Ting Chien's contributions to semiconductor technology through his innovative patent demonstrate his expertise and commitment to advancing the field. His work continues to influence the efficiency of semiconductor manufacturing processes.