Tetsuro Nakasugi

Title: Tetsuro Nakasugi: Innovator in Imprint Technology

Introduction

Tetsuro Nakasugi is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of imprint technology, holding a total of 3 patents. His work focuses on advanced imprint apparatuses and methods that enhance the manufacturing processes in semiconductor devices.

Latest Patents

Nakasugi's latest patents include an innovative imprint apparatus and method. This apparatus features a moveable substrate support designed to hold a substrate with a transfer target material. It also includes a template holder for a pattern to be transferred, a light source that emits light at varying intensities, and a controller that manages the exposure conditions for the transfer target material. The controller ensures that the material undergoes both temporary and main curing processes effectively. Another notable patent involves an imprint apparatus that presses a fine pattern from an original plate onto a photo-curable resin on a substrate. This method allows for precise pattern transfer by applying light, showcasing Nakasugi's expertise in the field.

Career Highlights

Tetsuro Nakasugi is currently employed at Kioxia Corporation, where he continues to innovate in the realm of imprint technology. His work has been instrumental in advancing the capabilities of semiconductor manufacturing, making processes more efficient and effective.

Collaborations

Nakasugi collaborates with talented individuals such as Masayuki Hatano and Kazuya Fukuhara. Their combined expertise contributes to the development of cutting-edge technologies in the industry.

Conclusion

Tetsuro Nakasugi is a key figure in the field of imprint technology, with a focus on enhancing semiconductor manufacturing processes. His innovative patents and collaborations reflect his commitment to advancing technology in this critical area.