Tetsuo Sano

Title: Innovations of Tetsuo Sano in Pattern Inspection Technology

Introduction

Tetsuo Sano is a prominent inventor based in Kyoto, Japan, known for his significant contributions to the field of pattern inspection technology. With a total of 12 patents to his name, Sano has developed innovative methods and apparatuses that enhance the accuracy of defect detection in various substrates.

Latest Patents

Among his latest patents, Sano has introduced a "Method of and apparatus for inspecting pattern defects." This defect inspection apparatus utilizes a compare check method to inspect defects, even when only one object substrate is available. In cases where multiple substrates are inspected, the apparatus corrects a reference pattern image based on the results of the defect inspection. This method is particularly applicable to printed wire boards with identical unit patterns, allowing for effective defect detection by comparing a master area with object areas.

Another notable patent is the "Method of and apparatus for detecting pattern defects." This innovation expands the periphery of a master pattern area by a specified number of pixels, enabling a two-dimensional misregistration comparison with an object pattern. The system determines whether the object pattern is defective based on the results of these comparisons, ensuring high accuracy even in the presence of misregistration errors.

Career Highlights

Sano has worked with notable companies such as Dainippon Screen Manufacturing Co., Ltd. and Dainippon Screen Seizo Kabushiki-kaisha. His experience in these organizations has allowed him to refine his expertise in pattern inspection technologies and contribute to advancements in the field.

Collaborations

Throughout his career, Sano has collaborated with esteemed colleagues, including Eiji Kodama and Takashi Sakamoto. These partnerships have fostered a collaborative environment that has led to innovative solutions in pattern inspection.

Conclusion

Tetsuo Sano's work in pattern inspection technology has significantly impacted the industry, showcasing his innovative spirit and dedication to enhancing defect detection methods. His contributions continue to influence advancements in this critical area of technology.