Company Filing History:
Years Active: 2023
Title: Innovations by Tatsunori Izumi in Wafer Edge Polishing Technology.
Introduction
Tatsunori Izumi is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of wafer processing. His innovative approach has led to the development of advanced technologies that enhance the efficiency and effectiveness of wafer edge polishing.
Latest Patents
One of Tatsunori Izumi's key patents is for a wafer edge polishing apparatus and method. This invention includes a cleaning mechanism that effectively removes slurry residue adhered to a chuck table. The apparatus features a chuck table that holds a wafer, a rotation drive mechanism for rotating the chuck table, and an edge polishing unit that polishes the wafer's edge while supplying slurry. Additionally, a cleaning unit is incorporated to remove any slurry residue from the chuck table, utilizing high-pressure cleaning and brush-cleaning techniques.
Career Highlights
Tatsunori Izumi is currently employed at Sumco Corporation, a leading company in the semiconductor industry. His work focuses on improving wafer processing technologies, which are crucial for the production of high-quality semiconductor devices. His innovative contributions have positioned him as a valuable asset in the field.
Collaborations
Throughout his career, Tatsunori has collaborated with talented individuals such as Makoto Ando and Ryuichi Tanimoto. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies in wafer processing.
Conclusion
Tatsunori Izumi's contributions to wafer edge polishing technology exemplify the importance of innovation in the semiconductor industry. His patented inventions and collaborative efforts continue to drive advancements in this critical field.