Company Filing History:
Years Active: 2003
Title: Innovations of Tarek Suwwan De Felipe
Introduction
Tarek Suwwan De Felipe is an accomplished inventor based in Mountain View, CA. He has made significant contributions to the field of integrated circuit fabrication, holding 2 patents that showcase his innovative approaches to technology.
Latest Patents
One of his latest patents is titled "Deposition of conformal copper seed layers by control of barrier layer morphology." This invention focuses on improving the deposition of conformal copper seed layers in integrated circuits by controlling the morphology of the barrier layer beneath the copper seed layer. The barrier layer can consist of materials such as TaN and Ta, or TaN alone, and the process conditions are designed to achieve a highly amorphous crystalline structure. This advancement allows for a more effective deposition of the copper seed layer, reducing susceptibility to agglomeration.
Another notable patent is "Method of depositing a diffusion barrier for copper interconnection applications." This invention outlines methods for forming diffusion barrier layers in integrated circuit fabrication. The methods enable selective deposition of a metal-nitride barrier layer on partially fabricated integrated circuits, converting the barrier material into an effective diffusion barrier layer with low via resistance. The use of TiN in this process allows for differential morphology in a single barrier layer deposition, ensuring minimal increase in via resistance after barrier formation.
Career Highlights
Tarek Suwwan De Felipe is currently employed at Novellus Systems Incorporated, where he continues to push the boundaries of innovation in semiconductor technology. His work has been instrumental in enhancing the performance and reliability of integrated circuits.
Collaborations
Throughout his career, Tarek has collaborated with notable colleagues, including Michal Danek and Erich R Klawuhn. These collaborations have contributed to the advancement of technologies in the semiconductor industry.
Conclusion
Tarek Suwwan De Felipe's contributions to the field of integrated circuits through his patents and innovative methods highlight his role as a leading inventor in the technology sector. His work continues to influence the future of semiconductor fabrication.