Company Filing History:
Years Active: 2016-2017
Title: Innovations by Tae-geun Kim
Introduction
Tae-geun Kim is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of lithography, particularly in the development of reflective masks and pellicle films used in extreme ultraviolet (EUV) lithography. With a total of 2 patents, his work has advanced the technology used in semiconductor manufacturing.
Latest Patents
Tae-geun Kim's latest patents include innovative designs for reflective masks and methods of manufacturing them. The first patent focuses on reflective masks that incorporate a reflective multi-layer on a mask substrate. This design features a plurality of support patterns that are strategically spaced apart within the main trench of the reflective multi-layer. These support patterns correspond to areas of the reflective mask that are not transferred onto an exposure target substrate, effectively partitioning the main trench into auxiliary trenches. Additionally, the reflective mask includes a light absorption pattern with multiple auxiliary light absorption patterns in the auxiliary trenches.
The second patent pertains to a pellicle for EUV lithography, which consists of a pellicle film, a supporting structure, and a handling block. The pellicle film is designed to allow EUV light to pass through while protecting the mask from contamination byproducts generated during the lithography process. The supporting structure is arranged on the pellicle film's second surface to provide support, while the handling block allows for safe handling of the pellicle without damaging the thin film.
Career Highlights
Tae-geun Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of lithography processes.
Collaborations
Throughout his career, Tae-geun Kim has collaborated with talented colleagues, including Su-Young Lee and Jong-Gul Doh. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Tae-geun Kim's contributions to the field of lithography through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a key innovator in semiconductor technology. His advancements in reflective masks and pellicle films are paving the way for future developments in the industry.