Company Filing History:
Years Active: 2012-2015
Title: **Innovations of Sudeep Kumar Lahiri: Pioneering Methods in Conductive Layer Thickness Monitoring**
Introduction
Sudeep Kumar Lahiri, an accomplished inventor based in Mountain View, CA, has made significant contributions to the field of eddy current sensing technology. With two patents to his name, Lahiri's work has enhanced the accuracy and efficiency of monitoring thickness in conductive layers, making advances in various industrial applications.
Latest Patents
Lahiri's latest patents focus on innovative methods for monitoring the thickness of conductive layers and calibrating eddy current sensors. These methods involve creating a calibration curve that correlates the thickness of a conductive layer in a magnetic field with values measured by the sensors. This calibration can include analytic functions with an infinite number of terms, such as trigonometric, hyperbolic, and logarithmic functions. By achieving high accuracy, Lahiri's methods eliminate the need for optical sensors, thus enabling the use of eddy current sensors for critical applications such as endpoint detection, transition call detection, and closed-loop control, where process parameters can be adjusted based on the changes in magnetic flux density across processing zones.
Career Highlights
Sudeep Kumar Lahiri is currently employed at Novellus Systems Incorporated, a company known for its focus on manufacturing equipment for the semiconductor industry. His role at Novellus has allowed him to delve into the intricacies of sensor technology and its applications in real-world scenarios, bringing his theoretical inventions into practical use.
Collaborations
Throughout his career, Lahiri has collaborated with talented professionals in the field, notably working alongside Paul Franzen. Their teamwork has played a vital role in refining the methods and apparatuses essential for conductive layer thickness measurement and sensor calibration.
Conclusion
Sudeep Kumar Lahiri's contributions to eddy current sensing technology exemplify the innovation and expertise present in the field of conductive layer thickness monitoring. His patents not only enhance industrial processes but also pave the way for future advancements in sensor technology. With his ongoing work at Novellus Systems, Lahiri continues to push the boundaries of what is possible in this dynamic field.