Company Filing History:
Years Active: 1999
Title: Innovations by Steven T. Slasor in Wafer Cleaning Processes
Introduction
Steven T. Slasor is an accomplished inventor based in Palm Bay, FL (US). He holds a patent for a significant innovation in the field of semiconductor manufacturing. His work focuses on improving the pre-thermal treatment processes for silicon wafers, which are crucial in the production of high-quality semiconductor devices.
Latest Patents
Steven T. Slasor's patent, titled "SC-2 based pre-thermal treatment wafer cleaning process," outlines a method for pre-heat-treatment processing of silicon wafers. This process involves an initial step of contacting the wafer with a pre-clean SC-1 bath, resulting in a highly particle-free silicon wafer surface. Following a deionized water rinse, the wafer is treated with an aqueous solution containing hydrofluoric acid and hydrochloric acid to eliminate metallic-containing oxides from the surface. The final step utilizes an SC-2 bath, which contains hydrogen peroxide and a dilute concentration of metal-scouring hydrochloric acid, to grow a hydrophilic oxide layer. This innovative cleaning process ensures that the resulting silicon oxide layer has a metal concentration no greater than 1×10⁹, significantly enhancing the diffusion length of minority carriers from approximately 500-600 microns to 800-900 microns.
Career Highlights
Steven T. Slasor is associated with Harris Corporation, where he has contributed to advancements in semiconductor technology. His expertise in wafer cleaning processes has positioned him as a valuable asset in the field of electronics manufacturing. His innovative approach has the potential to improve the efficiency and quality of semiconductor devices.
Collaborations
Some of Steven's notable coworkers include Jack H. Linn and George V. Rouse. Their collaboration has likely contributed to the development and refinement of innovative technologies within their organization.
Conclusion
Steven T. Slasor's contributions to the field of semiconductor manufacturing through his patented wafer cleaning process demonstrate his commitment to innovation. His work not only enhances the quality of silicon wafers but also plays a crucial role in advancing semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.