Location History:
- Chatham, NJ (US) (1992 - 1994)
- Basking Ridge, NJ (US) (1994 - 1997)
Company Filing History:
6 out of 3,345 
2 out of 9,364 
2 out of 4,208 
Years Active: 1992-1997
Title: Innovations of Steven D. Berger
Introduction
Steven D. Berger is a notable inventor based in Chatham, NJ, with a remarkable portfolio of 10 patents. His work primarily focuses on advancements in projection lithography, a critical technology in the field of semiconductor manufacturing.
Latest Patents
Among his latest patents, one significant invention is a projection lithography apparatus. This invention addresses the challenge of contrast introduced into radiation-sensitive materials due to the proximity effect. The method involves a lens system with a back focal plane filter that contains two apertures: an image aperture and a proximity effect correction aperture. This innovative approach allows patterned radiation to be transmitted through the image aperture, effectively introducing the desired image into the energy-sensitive resist material. Additionally, a portion of the inverse pattern radiation is transmitted through the proximity effect correction aperture, which helps to remove the contrast caused by the proximity effect in a single exposure.
Another notable patent is a process for device fabrication using projection lithography. This invention shares similarities with the previous one, focusing on the effective removal of contrast in radiation-sensitive materials caused by the proximity effect. The method utilizes a lens system and a back focal plane filter to achieve its objectives, showcasing Berger's expertise in this complex field.
Career Highlights
Steven D. Berger has had a distinguished career, having worked with prestigious organizations such as AT&T Bell Laboratories and Lucent Technologies Inc. His contributions to these companies have significantly advanced the field of projection lithography and semiconductor technology.
Collaborations
Throughout his career, Berger has collaborated with esteemed colleagues, including James Alexander Liddle and John M. Gibson. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Steven D. Berger's contributions to projection lithography and his impressive portfolio of patents highlight his significant impact on the field of semiconductor manufacturing. His innovative approaches continue to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.