Location History:
- Plesanton, CA (US) (2004)
- Pleasanton, CA (US) (2005)
Company Filing History:
Years Active: 2004-2005
Title: Steve Lassig: Innovator in Trench Etch Processes
Introduction
Steve Lassig is a notable inventor based in Pleasanton, CA (US). He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of trench etch processes for low-k dielectrics. With a total of 2 patents to his name, Lassig's work has advanced the technology used in creating interconnect structures in integrated circuits.
Latest Patents
One of Steve Lassig's latest patents is focused on a trench etch process for low-k dielectrics. This innovative method involves the formation of trenches within a dielectric layer. The process begins with etching a via within the dielectric layer, followed by the use of an organic plug to fill a portion of the via. After the desired amount of organic plug has been etched, a trench is created using a first gas mixture to a specified depth. A second gas mixture is then employed to further etch the trench to its final depth. This method is particularly beneficial for low-k dielectrics that lack an intermediate etch stop layer. The result is an interconnect structure with substantially orthogonal trench and via edges, enhancing the performance of semiconductor devices.
Career Highlights
Steve Lassig is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in the development of advanced etching technologies. Lassig's expertise in trench etch processes has contributed to the company's reputation for innovation and excellence in semiconductor manufacturing.
Collaborations
Throughout his career, Steve has collaborated with talented individuals such as SiYi Li and S M Reza Sadjadi. These collaborations have fostered a creative environment that has led to the successful development of new technologies and processes in the semiconductor field.
Conclusion
Steve Lassig's contributions to trench etch processes for low-k dielectrics exemplify his commitment to innovation in semiconductor manufacturing. His patents and work at Lam Research Corporation highlight his role as a significant inventor in the industry.