Cambridge, MA, United States of America

Stephen D Swartz


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 11(Granted Patents)


Company Filing History:


Years Active: 2003

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1 patent (USPTO):Explore Patents

Title: Innovations of Stephen D. Swartz in Precision Measurement

Introduction

Stephen D. Swartz is an accomplished inventor based in Cambridge, MA (US). He has made significant contributions to the field of precision measurement through his innovative patent. His work focuses on enhancing the accuracy of distance measurements, which is crucial in various scientific and industrial applications.

Latest Patents

Stephen D. Swartz holds a patent for a "Method and apparatus for enhanced precision interferometric distance measurement." This invention provides a method and apparatus that enhances the precision of distance or position measurements using a two-wavelength interferometer. The invention allows for the direct measurement of air density fluctuations, enabling corrections for measurement errors caused by air turbulence and thermal variations. It can function as a precision enhancement to existing systems or as a stand-alone system, measuring both uncorrected distance and air density while providing a corrected distance value. The novel measurement head design significantly reduces errors due to polarization leakage, and the innovative signal processing technique minimizes the cost, size, and complexity of the measurement system. This invention is particularly beneficial for lithographic integrated-circuit wafer production applications with critical dimensions below 0.1 µm.

Career Highlights

Stephen D. Swartz is associated with Science Research Laboratory, Inc., where he continues to develop and refine his innovative technologies. His work has positioned him as a key figure in the field of precision measurement.

Collaborations

Stephen has collaborated with notable colleagues, including Shrenik Deliwala and Allen M. Flusberg, contributing to advancements in measurement technologies.

Conclusion

Stephen D. Swartz's innovative work in precision measurement exemplifies the impact of inventions on technology and industry. His contributions continue to influence the field and enhance measurement accuracy in various applications.

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