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Tachikawa, Japan

Shinya Nakagawa

USPTO Granted Patents = 6

Average Co-Inventor Count = 4.4

ph-index = 4

Forward Citations = 83(Granted Patents)

Location History:

Kodaira, JP (1987 - 1991)
Tachikawa, JP (1992 - 1995)

Company Filing History:

6 out of 42,508

Years Active: 1987-1995

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6 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 5432608 - Method of making semiconductor integrated circuit, pattern detecting (1995-07-11),

2. 5260771 - Method of making semiconductor integrated circuit, pattern detecting (1993-11-09),

3. 5094539 - Method of making semiconductor integrated circuit, pattern detecting (1992-03-10),

4. 5025284 - Exposure method and exposure apparatus (1991-06-18),

5. 4974018 - Exposure method and exposure apparatus (1990-11-27),

6. 4699505 - Exposure method and exposure apparatus (1987-10-13),

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