Company Filing History:
Years Active: 2000
Title: Innovations by Shigeki Honda in Plasma Processing Technology
Introduction
Shigeki Honda, an accomplished inventor based in Sagamihara, Japan, has made significant contributions to the field of plasma processing technology. With a unique patent under his name, he has demonstrated innovation that supports advancements in manufacturing processes such as etching, ashing, and chemical vapor deposition (CVD) in large scale integrated circuits (LSIs) and liquid crystal display (LCD) panels.
Latest Patents
Honda holds a patent for a Plasma Processing Apparatus and Plasma Processing Method. This invention is particularly suitable for the application of plasma processing in the manufacturing of LSIs and LCDs. The apparatus is designed with a distinctive reaction chamber that features an inner side wall, which is electrically isolated from other components. This innovative design enhances the repeatability of plasma processing, a critical factor in manufacturing consistency. Furthermore, the apparatus includes thermal isolation for the inner side wall and temperature control mechanisms to optimize the performance and maintainability of the device.
Career Highlights
Shigeki Honda's career is anchored at Sumitomo Metal Industries, Ltd., where he has focused on developing technologies that advance the field of plasma processing. His efforts have positioned him as a key figure in the innovation of manufacturing techniques vital for the electronics industry.
Collaborations
Throughout his career, Honda has worked alongside esteemed colleagues such as Hiroshi Mabuchi and Toshihiro Hayami. Together, they have shared insights and collaborated on projects that have further propelled advancements in plasma technology, contributing to improved processes in the electronics sector.
Conclusion
Shigeki Honda's contributions to plasma processing technology exemplify the impact of innovative thinking in engineering and manufacturing. As industries continue to evolve, his inventions will play a critical role in the development of efficient and effective manufacturing processes for LSIs and LCDs.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.