Company Filing History:
Years Active: 2009
Title: Shigeaki Uchida: Innovator in Extreme Ultraviolet Light Sources
Introduction
Shigeaki Uchida is a prominent inventor based in Osaka, Japan. He is known for his significant contributions to the field of extreme ultraviolet (EUV) light sources. His innovative work has implications for various applications, particularly in the semiconductor industry.
Latest Patents
Uchida holds a patent for an extreme ultraviolet light source and its target. The objective of this invention is to provide a target that emits extreme ultraviolet light with high emission efficiency. The patent describes a solid target made of heavy metal or heavy-metal compound, with a density ranging from 0.5 to 80% of the crystal density. When irradiated with a laser beam, the target generates plasma from the heavy metal, emitting extreme ultraviolet light at a predetermined wavelength. This design allows for improved emission efficiency by controlling the space distribution of the generated plasma, thus minimizing energy loss.
Career Highlights
Shigeaki Uchida is affiliated with Osaka University, where he conducts research and development in advanced light sources. His work has garnered attention for its potential to enhance the efficiency of extreme ultraviolet light sources, which are crucial for modern lithography processes in semiconductor manufacturing.
Collaborations
Uchida has collaborated with notable colleagues, including Keiji Nagai and Hiroaki Nishimura. Their joint efforts have contributed to advancements in the field of extreme ultraviolet technology.
Conclusion
Shigeaki Uchida's innovative work in extreme ultraviolet light sources exemplifies the importance of research and development in advancing technology. His contributions continue to influence the semiconductor industry and beyond.