Shaungqi Dong

Title: Innovations by Inventor Shaungqi Dong in Charged Particle Beam Technology

Introduction

Shaungqi Dong is an accomplished inventor based in Tokyo, Japan, known for his significant contribution to the field of charged particle beam technology. With one patent to his name, his innovative work focuses on enhancing the capabilities of charged particle beam apparatuses, catering to high-resolution imaging while minimizing beam irradiation.

Latest Patents

Dong's patent is dedicated to a charged particle beam apparatus designed to achieve dual objectives: capturing high-resolution images of inspection target patterns and reducing the total beam irradiation when inspecting specific patterns from a complex set. The invention encompasses a method where either the stage or deflector is precisely controlled to navigate the field of view from a reference point to the desired inspection area. This inventive apparatus counts the number of objects in an initial image taken during the scanning process and, if this number meets certain pre-set criteria, it generates a second image with a charged particle beam operating at a higher dose, thus enhancing the inspection capabilities.

Career Highlights

Shaungqi Dong is affiliated with Hitachi High-Tech Corporation, a company renowned for its cutting-edge technology and innovation in various domains, including imaging and inspection technologies. His dedication to pushing the boundaries of what's possible in charged particle beam technology underscores his status as an influential inventor within the industry.

Collaborations

During his tenure at Hitachi High-Tech Corporation, Dong collaborates with esteemed colleagues such as Shinya Ueno and Hiroshi Nishihama. Together, they contribute to advancing the company's mission of delivering pioneering technologies and solutions that cater to the evolving needs of various sectors.

Conclusion

In conclusion, Shaungqi Dong's work exemplifies innovation within the realms of charged particle beam technology. With a focus on enhancing image resolution and minimizing beam exposure, his patented invention stands as a testament to his ingenuity and the collaborative spirit at Hitachi High-Tech Corporation. As the field of charged particle technology continues to evolve, the contributions of inventors like Dong play a crucial role in shaping its future.