Company Filing History:
Years Active: 1997
Title: Innovations by Shaohua Liu in Film Thickness Analysis
Introduction
Shaohua Liu is an accomplished inventor based in San Jose, CA. He has made significant contributions to the field of material analysis, particularly through his innovative methods for determining film thickness and free carrier concentration.
Latest Patents
Shaohua Liu holds a patent for a method that analyzes film thickness and free carrier concentration. This method involves irradiating an exposed surface of a structure using spectral radiation. The measured reflectance spectrum is then compared to a calculated spectrum. By utilizing algorithms that incorporate complex refractive indices, layer thickness, dielectric constants, and free carrier concentrations, the method iteratively assigns values to these parameters. This process aims to produce a best fit relationship between the compared spectra, ultimately determining the thickness and free carrier concentration.
Career Highlights
Shaohua Liu is currently employed at Online Technologies, Inc., where he continues to develop and refine his innovative methods. His work has garnered attention for its potential applications in various industries, including semiconductor manufacturing and materials science.
Collaborations
Shaohua Liu has collaborated with notable colleagues such as Peter R. Solomon and Peter A. Rosenthal. Their combined expertise has contributed to advancements in the field of film analysis and material characterization.
Conclusion
Shaohua Liu's innovative approach to film thickness and free carrier concentration analysis showcases his dedication to advancing technology in material science. His contributions are paving the way for future developments in this critical area.