Satoru Yamazaki is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of charged-particle beam technology, holding a total of 13 patents. His work has advanced the methods and devices used in this specialized area of research and application.

Latest Patents

Yamazaki's latest patents include a charged-particle-beam exposure device and a charged-particle-beam exposure method. This innovative method focuses on detecting deficiencies in an aperture used during the charged-particle-beam exposure process, which employs at least two exposure columns. Each exposure column passes a charged-particle beam through an aperture formed through a mask, shaping the cross-section of the beam before it is directed onto an object. The method involves several steps, including mounting masks with the same aperture to the exposure columns, scanning the charged-particle beam over a marked area, obtaining signal waveforms from scattered charged particles, and comparing these waveforms between the exposure columns.

Career Highlights

Satoru Yamazaki is currently associated with Fujitsu Corporation, where he continues to innovate and develop new technologies. His expertise in charged-particle beam technology has positioned him as a key figure in this field.

Collaborations

Yamazaki has worked alongside notable colleagues such as Kiichi Sakamoto and Hiroshi Yasuda. Their collaborative efforts have contributed to the advancements in charged-particle beam applications.

Conclusion

Satoru Yamazaki's contributions to charged-particle beam technology exemplify his innovative spirit and dedication to advancing scientific research. His patents and collaborative work continue to influence the field significantly.

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