Company Filing History:
Years Active: 2020-2022
Title: Innovations of Saewon Na in Substrate Treatment Technology
Introduction
Saewon Na is a notable inventor based in Cheongju-si, South Korea. He has made significant contributions to the field of substrate treatment technology, holding two patents that showcase his innovative approach to enhancing process efficiency.
Latest Patents
Saewon Na's latest patents include an "Apparatus and method for treating substrate." This invention features a process chamber with a treatment space, a support unit for the substrate, a gas supply unit for introducing process gas, and an RF power supply that excites the gas into plasma. The matching circuit in this apparatus includes an impedance matching device and a harmonic removal device, which operates in two modes depending on the presence of harmonics. Another patent under his name is also titled "Apparatus and method for treating substrate," which describes a substrate treating apparatus with a process chamber, a support unit, a gas supply unit, and a plasma generating unit. This unit consists of an upper electrode, a lower electrode, and three high-frequency power sources, allowing for advanced plasma generation.
Career Highlights
Saewon Na is currently employed at Semes Co., Ltd., where he continues to develop innovative technologies in substrate treatment. His work has significantly impacted the efficiency and effectiveness of processes in this field.
Collaborations
Some of his coworkers include Jamyung Gu and Shin-Woo Nam, who contribute to the collaborative environment at Semes Co., Ltd.
Conclusion
Saewon Na's contributions to substrate treatment technology through his patents reflect his dedication to innovation and advancement in the field. His work continues to influence the industry positively.