Company Filing History:
Years Active: 2025
Title: Profile of Inventor Ryusuke Eijima: Innovator in Plasma Processing Technology
Introduction: Ryusuke Eijima, based in Tokyo, Japan, is a distinguished inventor known for his contributions to plasma processing technology. With a patent focused on enhancing the efficiency and yield of plasma processing apparatuses, Eijima stands as a notable figure within the field.
Latest Patents: Eijima holds a patent for a "Plasma processing apparatus and plasma processing method." This innovative apparatus features a metal base member with either a disk shape or a cylindrical shape, strategically arranged within a sample table. The design incorporates a refrigerant flow path arranged concentrically around the center of the base member and includes at least one temperature sensor. Furthermore, the controller in the apparatus is engineered to detect the temperature of the base member or the wafer, utilizing a set of linear functions that indicate the relationship between the error and the set temperature of the refrigerant. This invention improves the yield of plasma processing and demonstrates Eijima's expertise in the field.
Career Highlights: Ryusuke Eijima is associated with Hitachi High-Tech Corporation, where he has applied his skills and knowledge in plasma processing technology. His patent reflects his commitment to research and innovation, contributing significantly to advancements in the industry.
Collaborations: Throughout his career, Eijima has worked alongside esteemed colleagues such as Yuki Tanaka and Takamasa Ichino. Their collaborative efforts advance the field of plasma processing, showcasing the synergy of their combined expertise.
Conclusion: Ryusuke Eijima's work in plasma processing technology exemplifies the spirit of innovation that drives the advancement of industrial applications. His patented invention is a testament to his dedication and creativity, highlighting the impact that skilled inventors like him have on modern technology. As Eijima continues to contribute to his field, he represents the ongoing importance of innovation in shaping the future of technology.