Location History:
- Fairfield, CT (US) (1996 - 1997)
- Fairfield County, CT (US) (1997)
Company Filing History:
Years Active: 1996-1997
Title: Innovations of Ronald Michael Martino
Introduction
Ronald Michael Martino is a notable inventor based in Fairfield, CT (US). He has made significant contributions to the field of optical lithography, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of photomask illumination techniques.
Latest Patents
Martino's latest patents include a "Diffraction pupil filler modified illuminator for annular pupil fills." This invention achieves uniform illumination of a photomask in optical lithography by utilizing annular illumination of the conjugate pupil plane in a lithography tool. A spinning diffraction filter is integrated into a stepper to provide annular illumination on a time-averaged basis. This innovative approach allows for resolution enhancement without significant loss of light intensity and does not require redesigning the illuminator in the photolithographic exposure tool.
Another significant patent is "Continuous scale optical proximity correction by mask maker dose." This invention manipulates energy levels to modify the resultant photomask representation in a controlled manner. The final image in semiconductor device fabrication is made to closely resemble an ideal image. By assigning relative mask writer doses, feature sizes and shapes can be modified without physically altering the layout designs. This method allows for continuous scale line width variation for all features without impacting data volume.
Career Highlights
Martino is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of optical technologies. His work has been instrumental in advancing the capabilities of photolithography, which is crucial for semiconductor manufacturing.
Collaborations
Some of his notable coworkers include Lars W Liebmann and Joseph P Kirk, who have collaborated with him on various projects within the company.
Conclusion
Ronald Michael Martino's contributions to optical lithography through his patents demonstrate his commitment to innovation in the field. His work not only enhances manufacturing processes but also sets a foundation for future advancements in semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.