Company Filing History:
Years Active: 1988
Title: The Innovative Contributions of Robert K. Sakurai
Introduction
Robert K. Sakurai is a notable inventor based in Minneapolis, MN. He has made significant contributions to the field of plasma etching technology. His work has led to advancements that enhance the efficiency and effectiveness of plasma etchers used in various applications.
Latest Patents
One of Robert K. Sakurai's key patents is titled "Fixture for cleaning a plasma etcher." This invention provides a fixture that cleans a plasma etcher, which has a holding member that holds wafers for etching and an enclosing member that forms a chamber for the plasma. The fixture operates by producing a large voltage change near the enclosing member, enabling the cleaning of the enclosing member by the plasma itself. The design of the fixture allows it to fit inside the enclosing member and provides a surface that is substantially larger than that of the holding member, ensuring effective cleaning.
Career Highlights
Robert K. Sakurai is currently employed at Unisys Corporation, where he continues to innovate and contribute to technological advancements. His work at Unisys has allowed him to collaborate with other talented professionals in the field.
Collaborations
One of his notable coworkers is James N. Kruchowski. Together, they have worked on various projects that leverage their expertise in technology and innovation.
Conclusion
Robert K. Sakurai's contributions to the field of plasma etching technology exemplify the impact of innovative thinking in engineering. His patent for a cleaning fixture demonstrates his commitment to improving industrial processes. His work continues to influence the industry and inspire future innovations.