Company Filing History:
Years Active: 2001
Title: Reinhard Guenzel: Innovator in Plasma-Immersion Ion Implantation
Introduction
Reinhard Guenzel is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of plasma-immersion ion implantation, particularly through his innovative patent that enhances the efficiency and cost-effectiveness of this technology.
Latest Patents
Guenzel holds a patent for a "Modulator for plasma-immersion ion implantation." This modulator is designed to regulate high voltage pulsed plasma-immersion ion implantation (PIII), serving as a crucial component in PIII installations. The invention allows for low-cost and easy connection and disconnection of large high voltage pulsed currents during the implantation process. The pulse regulation is achieved through an additional electrode controlled by a shielding grid, which is integrated into the implantation chamber and connected to a capacitor for high voltage supply. The shielding grid is activated by a pulse generator, providing voltage pulses ranging from 1 to 2000 V. This innovative design ensures that the additional electrode can be insulated from the plasma or in electric contact with it, depending on the applied grid voltages.
Career Highlights
Reinhard Guenzel is associated with Forschungszentrum Rossendorf e.V., where he has been instrumental in advancing research in plasma technologies. His work has not only contributed to the scientific community but has also paved the way for practical applications in various industries.
Collaborations
Due to space constraints, the details of Guenzel's collaborations will not be covered in this article.
Conclusion
Reinhard Guenzel's contributions to the field of plasma-immersion ion implantation through his innovative patent demonstrate his commitment to advancing technology. His work continues to influence the industry and inspire future innovations.