Raj K Gupta

Title: Innovations of Raj K Gupta

Introduction

Raj K Gupta is an accomplished inventor based in San Francisco, CA. He holds two patents that showcase his expertise in microelectromechanical systems (MEMS) and fluid property measurements. His work has significant implications for device design and material property extraction.

Latest Patents

One of Gupta's latest patents focuses on the characterization of microelectromechanical structures. Accurate characterization of MEMS geometry is critical for device design and simulation, as well as for material property extraction and post-fabrication trimming. This patent presents a method for characterizing parameters describing MEMS structures resulting from the fabrication process or process variations. The preferred embodiment involves comparing experimentally obtained natural frequencies with numerical simulations to identify unknown values of structural parameters or parameter variations. Additionally, it teaches how electrostatically-driven laterally resonant comb-drive MEMS test structures with prescribed changes in spring width can be used to characterize systematic variations in process offsets and sidewall angles. The disclosed technique is both in-situ and non-destructive.

Another significant patent by Gupta involves electrostatically-actuated structures for fluid property measurements. This fluid property sensor includes a substrate with a first electrode and a flexible member adjacent to the substrate and the first electrode, which contains a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes, creating an electrostatic force that causes the flexible member to deflect a predetermined distance. A measuring circuit then measures the interval of time between the generation of the electrical signal and the deflection of the flexible member, allowing for the determination of a fluid property based on this interval. This sensor can be used to determine the viscosity of a fluid or the pressure of a compressible gas.

Career Highlights

Gupta has worked with prestigious institutions such as the Massachusetts Institute of Technology and Coventor, Inc. His experience in these organizations has contributed to his innovative work in the field of MEMS and fluid property sensors.

Collaborations

One of Gupta's notable collaborators is Stephen D Senturia, with whom he has likely shared insights and advancements in their respective fields.

Conclusion

Raj K Gupta's contributions to the fields of microelectromechanical systems and fluid property measurements highlight his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology and improving device design.