Company Filing History:
Years Active: 2001-2002
Title: Pravin Narawankar: Innovator in Semiconductor Technology
Introduction
Pravin Narawankar is a notable inventor based in Sunnyvale, CA, specializing in semiconductor technology. He has made significant contributions to the field, holding 2 patents that showcase his innovative approach to materials science.
Latest Patents
One of his latest patents involves the sequential in-situ heating and deposition of halogen-doped silicon oxide. This process creates a low dielectric constant insulating film on a substrate by introducing a process gas that includes a silicon source, a fluorine source, and oxygen into a chamber. The gas is transformed into a plasma to deposit the insulating film over the substrate. Following this, the wafer and the first portion of the insulating film are heated to a temperature between 100-500°C for a specified duration. The film may consist of several separate portions, with each deposition followed by a heating step. This innovative film exhibits a low dielectric constant and enhanced stability due to the absence of free fluorine.
Career Highlights
Pravin Narawankar is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on developing advanced materials and processes that enhance the performance of electronic devices.
Collaborations
Throughout his career, Pravin has collaborated with talented individuals such as Laxman Murugesh and Maciek Orczyk. These collaborations have contributed to the advancement of innovative technologies in the semiconductor field.
Conclusion
Pravin Narawankar's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations.