Company Filing History:
1 out of 832,761 Years Active: 2003
Title: Innovations of Peter Dürr in Microlithography
Introduction
Peter Dürr is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of microlithography, a crucial technology in the manufacturing of microelectronic devices. His innovative approach has led to the development of a unique method and apparatus that enhances the precision of patterning workpieces sensitive to electromagnetic radiation.
Latest Patents
Peter Dürr holds a patent for a "Method and apparatus for microlithography." This invention relates to an apparatus and method for patterning a workpiece arranged at an image plane and sensitive to electromagnetic radiation. The apparatus includes a source for emitting electromagnetic radiation directed onto a selected object plane, a computer-controlled reticle with multiple object pixels, and an optical projection system featuring a Fourier filter. This system is designed to create essentially parallel central axes of cones of radiation onto the image plane, ensuring that each cone corresponds to a specific object pixel in the reticle.
Career Highlights
Throughout his career, Peter Dürr has demonstrated a commitment to advancing technology in the field of microlithography. His innovative methods have not only improved the efficiency of patterning processes but have also contributed to the overall advancement of microfabrication techniques. His work is recognized for its potential applications in various high-tech industries.
Collaborations
Peter has collaborated with esteemed colleagues such as Torbjörn Sandström and Hubert Karl Lakner. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and expertise, further enhancing the impact of their collective work in the field.
Conclusion
Peter Dürr's contributions to microlithography exemplify the spirit of innovation and dedication to advancing technology. His patent and collaborative efforts highlight the importance of teamwork in achieving groundbreaking advancements in the field.