Company Filing History:
Years Active: 2006
Title: Peijun Jiang: Innovator in Photolithography Technology
Introduction
Peijun Jiang is a prominent inventor based in Beijing, China. He has made significant contributions to the field of photolithography, particularly in the development of systems for integrated circuits. His innovative approach has led to advancements that enhance the precision and efficiency of photolithographic processes.
Latest Patents
Peijun Jiang holds a patent for a "Photolithography system having multiple adjustable light sources." This invention relates to a device designed for the photolithography of integrated circuits. The system comprises a base plate, a precision working table, and an optical head array. The optical head array utilizes a line-array photosource scan-imaging device to implement the optical probe technique. This device includes a line-array photosource made up of several adjacent linearly arranged micro-photosources, along with a micro-imaging system that performs micro-imaging for the photosource. The line-array photosource can be realized with multiple micro-lasers or a line-array photosource device. Additionally, a novel method is disclosed that allows for encoding based on the line-array photosource scan width. This integrated circuit photolithographic method enables alignment of the silicon wafer not only at the beginning of the photolithography process but also allows for repeated alignment as needed during the process.
Career Highlights
Peijun Jiang is affiliated with Tsinghua University, where he continues to engage in research and development in the field of photolithography. His work has garnered attention for its innovative solutions and practical applications in integrated circuit manufacturing.
Collaborations
Peijun Jiang has collaborated with notable colleagues, including Duanyi Xu and Guosheng Qi. Their combined expertise contributes to the advancement of technology in their respective fields.
Conclusion
Peijun Jiang's contributions to photolithography technology exemplify the impact of innovation in the field of integrated circuits. His patent and ongoing research at Tsinghua University highlight his role as a key figure in advancing this critical technology.