Company Filing History:
Years Active: 2015-2017
Title: Norihito Tsukamoto: Innovator in Substrate Processing Technology
Introduction
Norihito Tsukamoto is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 2 patents. His work focuses on developing advanced vacuum processing apparatuses that enhance efficiency and precision in substrate handling.
Latest Patents
Tsukamoto's latest patents include innovative designs for substrate processing apparatuses. The first patent describes a vacuum processing apparatus that reduces the attachment of particles generated in a processing space to the inner wall of a chamber. This invention allows for easy adjustment of pressure in the processing space while introducing gas at a desired flow rate. The apparatus features a container, a gas exhaust portion, a substrate holder, and a shield that divides the container into processing and outside spaces. Additionally, it includes a gas introducing portion, a plasma generating portion, and an exhaust portion with a communication path that is strategically hidden from the plasma generation area.
The second patent presents a substrate processing apparatus with an openable and closable lid, capable of precisely controlling the gap between multiple shields. This design includes a first shield on the lid's surface, an insertion section that supports the first shield, and a restriction section that limits its movement. The apparatus is engineered to bias the first shield towards a member inside the chamber when the lid is closed, ensuring optimal processing conditions.
Career Highlights
Norihito Tsukamoto is associated with Canon Anelva Corporation, where he has been instrumental in advancing substrate processing technologies. His innovative designs have contributed to the company's reputation for excellence in the field.
Collaborations
Tsukamoto has collaborated with notable colleagues, including Toshikazu Nakazawa and Keisuke Ueda. Their combined expertise has fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Norihito Tsukamoto's contributions to substrate processing technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of the challenges in the field and provide solutions that enhance processing efficiency. His work continues to influence the industry and inspire future advancements.