Company Filing History:
Years Active: 1992-1994
Title: Nobuyuki Hirai: Innovator in Wafer Cleaning Technology
Introduction
Nobuyuki Hirai is a distinguished inventor hailing from Hikone, Japan. With a focus on innovations in semiconductor technology, he has made significant strides in developing advanced methods and apparatus for wafer cleaning. His contributions are vital for maintaining the integrity of semiconductor production processes.
Latest Patents
Hirai holds two notable patents, both related to wafer cleaning methods and apparatus. His latest patent describes a breakthrough in wafer cleaning technology, where a cleaning solution is evaporated at a temperature below its boiling point. The resulting cleaning vapor is then applied at a temperature above its dew point to semiconductors, achieving a clean surface without the formation of colloidal silica or aerosols. This innovative approach enables uniform etching free of impurities. The apparatus encompasses a cleaning solution storage, a vapor generating section, a wafer supporting position, and a vapor supply section, all designed to overlap in a compact housing while ensuring efficient sealing against vapor leakage.
Career Highlights
Nobuyuki Hirai currently works with Dainippon Screen Mfg. Co., Ltd., a company renowned for its cutting-edge technologies in semiconductor manufacturing equipment. His career is marked by a commitment to enhancing efficiency and effectiveness in wafer cleaning processes, establishing him as a vital player in the field of semiconductor technology.
Collaborations
Throughout his career, Hirai has collaborated with esteemed colleagues such as Masato Tanaka and Hisao Nishizawa. Together, they have worked on refining wafer cleaning methodologies and achieving groundbreaking results that push the boundaries of current technology.
Conclusion
Nobuyuki Hirai's inventive spirit and dedication to advancing wafer cleaning technology underscore his role as a key innovator in the semiconductor industry. His patents represent significant advancements, ensuring higher quality and cleaner semiconductor production processes. As technology continues to evolve, inventors like Hirai are pivotal in shaping the future of innovation within the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.