Nathan Kugland

Title: Nathan Kugland: Innovator in Gas Supply Delivery Systems

Introduction

Nathan Kugland is an accomplished inventor based in Oakland, CA. He has made significant contributions to the field of plasma processing systems, particularly in the area of gas supply delivery arrangements. His innovative work has led to the development of a unique patent that enhances gas flow control in various applications.

Latest Patents

Kugland holds a patent for a "Gas supply delivery arrangement including a gas splitter for tunable gas flow control." This invention involves a gas supply delivery arrangement designed for a plasma processing system. It facilitates the processing of substrates by introducing gases through multiple gas injection zones. The system includes process gas supply inlets and tuning gas inlets, along with a mixing manifold that connects gas sticks to both process and tuning gas supplies. The arrangement features multiple gas outlets that deliver gas to designated injection zones, ensuring precise control over gas flow.

Career Highlights

Nathan Kugland is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role involves working on advanced technologies that improve the efficiency and effectiveness of plasma processing systems. Kugland's expertise and innovative mindset have positioned him as a valuable asset to his team.

Collaborations

Kugland collaborates with talented professionals such as Mark Taskar and Iqbal A Shareef. Together, they work on projects that push the boundaries of technology and innovation in their field.

Conclusion

Nathan Kugland's contributions to gas supply delivery systems exemplify his commitment to innovation and excellence. His patent and work at Lam Research Corporation highlight his role as a key player in advancing plasma processing technologies.