Chigasaki, Japan

Nakaya Chida


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 14(Granted Patents)


Company Filing History:


Years Active: 1998

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1 patent (USPTO):Explore Patents

Title: Nakaya Chida: Innovator in Ion Implantation Technology

Introduction

Nakaya Chida is a prominent inventor based in Chigasaki, Japan. She has made significant contributions to the field of ion implantation technology. Her innovative work has led to the development of advanced apparatuses that enhance the efficiency and precision of ion implantation processes.

Latest Patents

Chida holds a patent for an ion implantation apparatus. This apparatus is equipped with an ion source and a mass spectrometer featuring an analyzer magnet. It is designed to extract ions with a specific kinetic energy and mass from the ions produced in the ion source. The apparatus includes a scanner system that scans an ion beam of the extracted ions and directs it onto a substrate. The system features a deflection electro-magnet that deflects the ion beam in a predetermined plane relative to a reference axis. Additionally, the apparatus comprises multiple vacuum chamber portions that facilitate the passage of the ion beam while modulating its potential for effective irradiation.

Career Highlights

Chida's career is marked by her dedication to advancing ion implantation technology. She has worked with Nihon Shinku Gijutsu Kabushiki Kaisha, where she has been instrumental in developing innovative solutions in this field. Her work has not only contributed to her company's success but has also had a lasting impact on the industry.

Collaborations

Throughout her career, Nakaya Chida has collaborated with notable colleagues, including Seiji Ogata and Yuzo Sakurada. These collaborations have fostered a creative environment that has led to groundbreaking advancements in ion implantation technology.

Conclusion

Nakaya Chida's contributions to ion implantation technology exemplify her innovative spirit and dedication to her field. Her patent for the ion implantation apparatus showcases her ability to solve complex challenges in technology. Chida's work continues to influence the industry and inspire future innovations.

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