Company Filing History:
Years Active: 2012-2015
Title: Mikio Nagai: Innovator in Plasma Processing Technology
Introduction
Mikio Nagai is a prominent inventor based in Fremont, CA, known for his contributions to plasma processing technology. With a total of 2 patents, he has made significant advancements in methods for detecting plasma instabilities, which are crucial for improving the efficiency and reliability of plasma processing systems.
Latest Patents
Nagai's latest patents include a "Passive capacitively-coupled electrostatic (CCE) probe method for detecting plasma instabilities in a plasma processing chamber." This innovative method involves collecting process data, which includes induced current signals flowing through a measuring capacitor. The data is then converted into analog voltage signals and subsequently into digital signals for analysis. This process allows for the detection of high-frequency perturbations that indicate plasma instability.
Another notable patent is the "Passive capacitively-coupled electrostatic (CCE) probe arrangement for detecting plasma instabilities in a plasma processing chamber." This arrangement features a probe that is positioned on the surface of the processing chamber and is designed to measure various plasma processing parameters. It includes a plasma-facing sensor and a measuring capacitor, which work together to convert induced current into digital signals for further processing.
Career Highlights
Mikio Nagai is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on enhancing plasma processing techniques, which are essential for the manufacturing of semiconductor devices.
Collaborations
Throughout his career, Nagai has collaborated with notable colleagues, including Jean-Paul Booth and Douglas L. Keil. These collaborations have contributed to the development of innovative solutions in the field of plasma processing.
Conclusion
Mikio Nagai's contributions to plasma processing technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the industry. His innovative methods for detecting plasma instabilities are paving the way for advancements in semiconductor manufacturing.