Mike Möritz

Title: Innovations of Mike Möritz in EUV Radiation Sources

Introduction

Mike Möritz is an accomplished inventor based in Jena, Germany. He has made significant contributions to the field of extreme ultraviolet (EUV) radiation sources. His innovative work focuses on the continuous generation of liquid tin as emitter material, which is crucial for advancing EUV technology.

Latest Patents

Möritz holds a patent for an "Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources." This invention addresses the need for a continuous supply of liquid emitter material, particularly metal, under high pressure. The design allows for uninterrupted operation, even when replenishing consumed emitter material. The system includes multiple pressure vessels and a high-pressure gas system, ensuring a constant emitter material pressure during operation.

Career Highlights

Mike Möritz is associated with Xtreme Technologies GmbH, where he applies his expertise in developing advanced technologies for EUV radiation. His work has been instrumental in enhancing the efficiency and reliability of EUV sources, which are essential for various applications, including semiconductor manufacturing.

Collaborations

Möritz collaborates with notable colleagues such as Diethard Kloepfel and Elma Weber. Their combined efforts contribute to the innovative projects at Xtreme Technologies GmbH, fostering a collaborative environment that drives technological advancements.

Conclusion

Mike Möritz's contributions to the field of EUV radiation sources exemplify the importance of innovation in technology. His patent and ongoing work at Xtreme Technologies GmbH highlight his commitment to advancing this critical area of research.