Company Filing History:
Years Active: 2001-2005
Title: Mie Nagao: Innovator in Semiconductor Technology
Introduction
Mie Nagao is a prominent inventor based in Chita, Japan. She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her innovative methods focus on improving the efficiency and effectiveness of electrostatic chucks used in semiconductor manufacturing.
Latest Patents
Mie Nagao's latest patents include a method for reducing particles from an electrostatic chuck. This method involves several steps: setting a wafer onto the attracting face of an electrostatic chuck, applying a voltage to attract the wafer, and releasing stress caused by heat expansion differences between the wafer and the chuck. The process also includes increasing the wafer's temperature to a saturated level while ensuring that the temperature difference remains within 50°C when the wafer is absorbed onto the electrostatic chuck.
Career Highlights
Mie Nagao is currently employed at NGK Insulators, Inc., where she continues to develop innovative solutions for the semiconductor industry. Her work has been instrumental in enhancing the performance of semiconductor manufacturing processes.
Collaborations
Mie collaborates with notable colleagues such as Masashi Ohno and Ryusuke Ushikoshi, contributing to a dynamic and innovative work environment.
Conclusion
Mie Nagao's contributions to semiconductor technology through her patents and collaborative efforts highlight her role as a leading inventor in her field. Her innovative methods are paving the way for advancements in semiconductor manufacturing.