Company Filing History:
Years Active: 2001-2010
Title: Michael Sherrard: Innovator in Substrate Cleaning Technologies
Introduction
Michael Sherrard is a notable inventor based in Los Altos, California. He has made significant contributions to the field of substrate cleaning and drying technologies. With a total of 4 patents to his name, Sherrard's work focuses on innovative methods that enhance the efficiency of cleaning processes.
Latest Patents
One of Sherrard's latest patents is an apparatus for cleaning and drying substrates. This invention provides a method that includes spraying a line of fluid onto a substrate, creating an air/fluid interface line. It also involves supplying a line of drying vapors to this interface line, which induces a Marangoni drying effect. The apparatus allows for the simultaneous cleaning, rinsing, and drying of substrates, significantly improving the overall efficiency of the process.
Another patent by Sherrard describes a similar method and apparatus for cleaning and drying substrates. This invention emphasizes the use of a tank containing cleaning and rinsing fluid, where a source of rinsing fluid directs fluid to the substrate surface. The drying vapor source then lowers the surface tension of the meniscus formed on the substrate, promoting Marangoni flow and enhancing drying efficiency.
Career Highlights
Michael Sherrard is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to develop and refine his innovative cleaning technologies, contributing to advancements in manufacturing processes.
Collaborations
Sherrard collaborates with Boris Fishkin, a fellow innovator in the field. Their partnership has fostered the development of cutting-edge technologies that address the challenges in substrate cleaning and drying.
Conclusion
Michael Sherrard's contributions to substrate cleaning technologies demonstrate his commitment to innovation and efficiency. His patents reflect a deep understanding of the complexities involved in cleaning processes, making him a valuable asset in the field.