Company Filing History:
Years Active: 2004-2010
Title: Inventor Michael Fritze: Innovating in Lithography
Introduction
Michael Fritze is a notable inventor based in Acton, Massachusetts, known for his significant contributions to the field of lithography. With a total of six patents under his name, Fritze has made remarkable advancements that have implications for various technological applications.
Latest Patents
Fritze's latest patents reveal his innovative approach to lithography. One such patent is a "Method and system of lithography using masks having gray-tone features," which outlines a method for forming patterns on a substrate through a dual exposure process. This technique utilizes a mask with gray-tone features that adjust the exposure dose in targeted regions, allowing for the creation of features with varying critical dimensions. The incorporation of sub-resolution features through pixellation enhances the flexibility and precision of the lithographic process.
Another noteworthy patent is the "Method for photolithography using multiple illuminations and a single fine feature mask." This method consists of exposing a substrate twice while keeping the same mask stationary, employing two distinct sets of illumination settings. This innovative approach to photolithography enhances the accuracy and efficiency of feature patterning on substrates.
Career Highlights
Michael Fritze is associated with the prestigious Massachusetts Institute of Technology, where he engages in cutting-edge research and development. His expertise and dedication to advancing lithographic techniques position him as a leader in his field. Fritze's contributions have not only advanced the technology but have also paved the way for further innovations within the industry.
Collaborations
Fritze collaborates closely with his coworker, Brian M Tyrrell, forming a team that combines their expertise to push the boundaries of lithography. Their joint efforts exemplify the importance of collaboration in driving technological advancements and achieving greater innovation in research.
Conclusion
Michael Fritze's innovative spirit and dedication to advancing lithography are evident through his multiple patents and collaborative efforts. His work not only enhances the capabilities of current technologies but also inspires future innovations in the field. As he continues his journey at the Massachusetts Institute of Technology, Fritze remains a key figure to watch in the world of invention and innovation.